HPFS® Fused Silica


Description

High Purity Non-Crystalline Silica Glass

Corning® High Purity Fused Silica glass is known throughout the semiconductor industry for its consistent, repeatable performance.

Fused Silica is offered in many different grades to support various product applications. Glass codes 7980, 7979, and 8655 are high purity non-crystalline silica glasses with excellent optical qualities.

Properties

  • Extraordinary low refractive index variations
  • State-of-the-art homogeneity values
  • Lowest birefringence values
  • Large size capabilities
  • Exceptional transmittance from the deep ultraviolet through the infrared region
  • Ultra-low thermal expansion coefficient

Applications

HPFS® Laser Resistance. Optical materials are at the heart of the semiconductor industry. Microlithography projects a pattern from a photomask through an optical system to create IC chips using ultraviolet laser light.

Optical inspection microscopes provide test capabilities for both masks and wafers at several different stages of the printing process. With the drive to smaller and smaller structures, the semiconductor industry continues its quest for better and better optical systems, and this in turn drives the requirements for the optical materials

Specifications

HPFS® Fused Silica Borosilicate glass overview
HPFS® Fused Silica Grade Selection Chart
HPFS® Fused Silica Data Sheet