HPFS® Fused Silica Standard Grade Wafers
Material Description
HPFS High Purity Fused Silica Standard Grade 7980 glass wafers are a high purity synthetic amorphous silicon dioxide manufactured by flame hydrolysis. The noncrystalline, colorless, silica glass combines a very low thermal expansion coefficient with excellent optical qualities and exceptional transmittance in ultraviolet. Fused Silica is available in various grades for different applications.
Glass Wafer Options
Coresix produces HPFS® Fused Silica Standard Grade Wafers to all SEMI Standards, including dimensional, flat and notch specifications. Additionally, we offer custom specifications designed to your unique needs, such as alignment marks, holes, pockets, edge profile, thickness, flatness, surface quality, cleanliness or other details critical to your application.
Wafer Specifications
| Attribute |
Standard |
Best |
| Grade |
0F 7980 |
0AA - 5G |
| Diameter |
50.8, 76.2, 100, 150, 200, 300 |
Custom Diameters |
| Diameter Tolerance |
+/- 200μm |
+/- 50 μm |
| Thickness |
.5, .7, 1.0, 2.0 |
Custom .45mm - 12.0mm |
| Thickness Tolerance |
+/- 50μm |
+/- 5 μm |
| Thickness Variation (TTV) |
<10μm |
<1μm |
| Scratch and Dig |
60/40 |
5/2 |
| Roughnes (RMS) |
<7Å |
<3Å |
| Warp |
<100μm |
<20μm |
| Flatness |
λ per Inch TIR |
λ/10 per Inch TIR |
