HPFS® Fused Silica Standard Grade Wafers
Material Description
HPFS® Standard Grade 7980, is a high purity synthetic amorphous silicon dioxide manufactured by flame hydrolysis. The noncrystalline, colorless, silica glass combines a very low thermal expansion coefficient with excellent optical qualities and exceptional transmittance in ultraviolet. It is available various grades for different applications.
Wafer Options
Coresix produces HPFS® Standard Grade Wafers to all SEMI Standards including dimensional, flat and notch specifications. Additionally, we offer custom specifications designed to your unique needs including, alignment marks, holes, pockets, edge profile, thickness, flatness, surface quality, cleanliness or other details critical to your application.
Wafer Specifications
| Attribute |
Standard |
Best |
| Grade |
0F 7980 |
0AA - 5G |
| Diameter |
50.8, 76.2, 100, 150, 200, 300 |
Custom Diameters |
| Diameter Tolerance |
+/- 200μm |
+/- 50 μm |
| Thickness |
.5, .7, 1.0, 2.0 |
Custom .45mm - 12.0mm |
| Thickness Tolerance |
+/- 50μm |
+/- 5 μm |
| Thickness Variation (TTV) |
<10μm |
<1μm |
| Scratch and Dig |
60/40 |
5/2 |
| Roughnes (RMS) |
<7Å |
<3Å |
| Warp |
<100μm |
<20μm |
| Flatness |
λ per Inch TIR |
λ/10 per Inch TIR |
