Glass Wafers

Corning® Eagle XG® Glass Wafers

Material Description

Corning® EAGLE XG® delivers dimensional stability and exceptionally clean, smooth, flat surfaces. The Alkaline earth boro-aluminosilicate composition includes no added heavy metals, reducing the environmental impact of manufacturing. It also features exceptional thinness, helping to completely avoid the potential environmental and health hazards associated with panel thinning.

Wafer Options

Coresix produces Eagle XG® wafers to all SEMI Standards including dimensional, flat and notch specifications. In addition, we offer custom specifications designed to your unique needs including, alignment marks, holes, pockets, edge profile, thickness, flatness, surface quality, cleanliness or any other details critical to your application.

Wafer Specifications

Attribute Standard Best
Diameter 50.8, 76.2, 100, 150, 200, 300, 450 Custom Diameters
Diameter Tolerance +/- 200μm +/- 50 μm
Thickness .7, 1.1, 1.75, 2.25, 2.75, 3.3 Custom .45mm - 1.1mm
Thickness Tolerance +/- 5% +/- 5 μm
Thickness Variation (TTV) <20μm <1μm
Scratch and Dig 60/40 5/2
Roughnes (RMS) <7Å <3Å
Warp <400μm <30μm
Flatness λ per Inch TIR λ/10 per Inch TIR

Electrical Properties

Log10 Volume Resistivity at 250°C -12.9 ohm-cm
at 500°C - 8.8 ohm-cm
Dielectric Constant (20°C,1kHz) 6.17
Loss Tangent  (20°C, 1kHz) 0.15%

Mechanical Properties

Density (20°C) 2.38 g/cc
Young's Modulus 73.6 GPa
Shear Modulus 30.1 GPa
Poisson's Ratio 0.23
Vickers Hardness (200gm load, 25 sec dwell) 640

Thermal Properties

Thermal Expansion

(0-300°C) 31.7 x 10-7 / °C
Room Temp 35.5 x 10-7 / °C
To Settling Point (25 - 675°C)

Thermal Conductivity

Temp (°C) Specific Heat (J/g-K) Thermal Diffusivity (cm2/sec) Thermal Conductivity (W/cm-K)
23 0.768 0.00601 0.0109
100 0.896 0.00572 0.0122
200 0.998 0.00546 0.0129
300 1.067 0.00530 0.0134
400 1.110 0.00522 0.0137
500 1.154 0.00518 0.0142

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Optical Properties

Optical Wavelength Refractive Index
435.8 nm 1.5198
467.8 nm 1.5169
480 nm 1.5160
508.6 nm 1.5141
546.1 nm 1.5119
589.3 nm 1.5099
643.8 nm 1.5078
Corning® Eagle XG® Glass Wafers Optical Transmission