|
Our lapping and polishing experience dates to the late ‘70’s when flat substrates were required for mirror coatings used in copy machines and printing presses. We have since paced with rapidly developing technologies in display, photo lithography, biotechnologies and other industries requiring precision optical glass components. Today, the Coresix lapping and polishing processes have evolved to meet the highest standards of thickness, flatness, roughness and cosmetic specifications.
Common Terms for Lapping
- Flatness - Of a surface is the degree to which it approximates a mathematical plane.
- Bow (& Warp) - A curve, bend or other deviation from flatness in glass.
- Roughness - Is a measurement of the small-scale variations in the height of a physical surface. A common measure of surface roughness is the rms (root-mean-square) height h of the surface bumps
- Waviness - This refers to the irregularities which are outside the roughness width cut off values. Waviness height is the peak to valley distance of the surface profile, measured in millimeters.
- TTV - Total Thickness Variation – expresses the maximum peak to valley measurement within a given part or from one part to the next.
Coresix Capabilities
Lapping
- Flatness: < 1μm
- Bow & Warp: < 1μm/inch
- Roughness: < 3Å
- TTV: < 1μm
- Thickness: +/- 5μm
- Size: < 300mm Ø
|
Polishing
- Defect Level: Sub-micron
- Size: < 300mm Ø
|
Metrology Equipment Used At Coresix - Tropel Flatmaster: measures flatness, line profile, radius and other surface parameters to accuracy of 50nm Zygo Interferometer: quickly measures surface roughness and flatness Smart Scope (OGP, Inc.): an optical CMM system for accurate dimensional measurements.
   |
|
